JPH0148605B2 - - Google Patents
Info
- Publication number
- JPH0148605B2 JPH0148605B2 JP16443583A JP16443583A JPH0148605B2 JP H0148605 B2 JPH0148605 B2 JP H0148605B2 JP 16443583 A JP16443583 A JP 16443583A JP 16443583 A JP16443583 A JP 16443583A JP H0148605 B2 JPH0148605 B2 JP H0148605B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- etching
- metal plate
- pattern
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 83
- 239000002184 metal Substances 0.000 claims description 81
- 238000005530 etching Methods 0.000 claims description 47
- 229920002120 photoresistant polymer Polymers 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 31
- 239000000853 adhesive Substances 0.000 claims description 23
- 230000001070 adhesive effect Effects 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 3
- 238000010292 electrical insulation Methods 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 description 18
- 239000011521 glass Substances 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16443583A JPS6056329A (ja) | 1983-09-06 | 1983-09-06 | 電極の製作法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16443583A JPS6056329A (ja) | 1983-09-06 | 1983-09-06 | 電極の製作法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6056329A JPS6056329A (ja) | 1985-04-01 |
| JPH0148605B2 true JPH0148605B2 (en]) | 1989-10-19 |
Family
ID=15793104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16443583A Granted JPS6056329A (ja) | 1983-09-06 | 1983-09-06 | 電極の製作法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6056329A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100616661B1 (ko) | 2005-01-13 | 2006-08-28 | 삼성전기주식회사 | 전자선 리소그래피를 이용한 표면탄성파 소자의 전극 패턴형성 방법 |
-
1983
- 1983-09-06 JP JP16443583A patent/JPS6056329A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6056329A (ja) | 1985-04-01 |
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